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Science 16 October 1998:
Vol. 282. no. 5388, pp. 402 - 405
DOI: 10.1126/science.282.5388.402
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News Focus

MICROMACHINES:
Fomenting a Revolution, in Miniature

Ivan Amato

Micro-electromechanical systems (MEMS) not only can think like Pentium chips but also can sense the world and act upon it. Fashioned largely from silicon with techniques adapted from the microchip industry, they are fast and generally cheap to mass-produce. And they boast startling mechanical sophistication--gears, levers, motors, and mazes--in packages no bigger than a standard computer chip: Scientists have already moved MEMS into various stages of conception and development for making laboratories on chips, data-storage technologies, cell-manipulating gadgets, propulsion systems for microsatellites, locking mechanisms for nuclear weapons, and many other applications.

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THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
Molecular phylogenetic analysis of Phyllanthaceae (Phyllanthoideae pro parte, Euphorbiaceae sensu lato) using plastid RBCL DNA sequences.
K. J. Wurdack, P. Hoffmann, R. Samuel, A. de Bruijn, M. van der Bank, and M. W. Chase (2004)
Am. J. Botany 91, 1882-1900
   Abstract »    Full Text »    PDF »
Electrochemical Micromachining.
R. Schuster, V. Kirchner, P. Allongue, and G. Ertl (2000)
Science 289, 98-101
   Abstract »    Full Text »


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