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Science 3 June 2005:
Vol. 308. no. 5727, pp. 1442 - 1446
DOI: 10.1126/science.1111041
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Reports

Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures

Mark P. Stoykovich,1 Marcus Müller,2 Sang Ouk Kim,3 Harun H. Solak,4 Erik W. Edwards,1 Juan J. de Pablo,1 Paul F. Nealey1{dagger}

Self-assembly is an effective strategy for the creation of periodic structures at the nanoscale. However, because microelectronic devices use free-form design principles, the insertion point of self-assembling materials into existing nanomanufacturing processes is unclear. We directed ternary blends of diblock copolymers and homopolymers that naturally form periodic arrays to assemble into nonregular device-oriented structures on chemically nanopatterned substrates. Redistribution of homopolymer facilitates the defect-free assembly in locations where the domain dimensions deviate substantially from those formed in the bulk. The ability to pattern nonregular structures using self-assembling materials creates new opportunities for nanoscale manufacturing.

1 Department of Chemical and Biological Engineering and Center for Nanotechnology, University of Wisconsin (UW), Madison, WI 53706, USA.
2 Department of Physics, University of Wisconsin, Madison, WI 53706, USA.
3 Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Republic of Korea.
4 Laboratory for Micro- and Nanotechnology, Paul Scherrer Institute, CH-5232 Villigen PSI, Switzerland.

{dagger} To whom correspondence should be addressed. E-mail: nealey{at}engr.wisc.edu

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THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly.
R. Ruiz, H. Kang, F. A. Detcheverry, E. Dobisz, D. S. Kercher, T. R. Albrecht, J. J. de Pablo, and P. F. Nealey (2008)
Science 321, 936-939
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Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates.
I. Bita, J. K. W. Yang, Y. S. Jung, C. A. Ross, E. L. Thomas, and K. K. Berggren (2008)
Science 321, 939-943
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