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Science 5 November 2004:
Vol. 306. no. 5698, pp. 986 - 987
DOI: 10.1126/science.1100080
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Perspectives

PHYSICS:
The Best Materials for Tiny, Clever Sensors

Chris Van Hoof, Kris Baert, Ann Witvrouw

In smart sensors, data are gathered and interpreted within the sensor. Such sensors are often more versatile, more reliable, smaller, and cheaper to manufacture than conventional sensors. Increasing their performance further will require monolithic integration, in which the sensor is directly interfaced with the electronic circuit. In their Perspective, Van Hoof et al. discuss different approaches toward achieving this integration. They conclude that one material, poly-SiGe, holds much promise for monolithic integration. However, future disposable sensors may make cheaper materials, such as metals and polymers, competitive

The authors are in the Microsystems Components and Packaging Division, IMEC, Kapeldreef 75, 3001 Leuven, Belgium. E-mail: chris.vanhoof{at}imec.be

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Science. ISSN 0036-8075 (print), 1095-9203 (online)