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Science 19 July 2002:
Vol. 297. no. 5580, pp. 376 - 378
DOI: 10.1126/science.1072191
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Reports
Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths
Randy A. Bartels,1
Ariel Paul,1
Hans Green,1
Henry C. Kapteyn,1
Margaret M. Murnane,1*
Sterling Backus,1
Ivan P. Christov,2
Yanwei Liu,34
David Attwood,34
Chris Jacobsen5
We present spatial coherence measurements of extreme
ultraviolet (EUV) light generated through the process of
high-harmonic up-conversion of a femtosecond laser. With a
phase-matched hollow-fiber geometry, the generated beam was found to
exhibit essentially full spatial coherence. The coherence of this
laser-like EUV source was shown by recording Gabor holograms of small
objects. This work demonstrates the capability to perform EUV
holography with a tabletop experimental setup. Such an EUV source, with
low divergence and high spatial coherence, can be used for experiments
involving high-precision metrology, inspection of optical components
for EUV lithography, and microscopy and holography with nanometer resolution. Furthermore, the short time duration of the EUV radiation (a few femtoseconds) will enable EUV microscopy and holography to be
performed with ultrahigh time resolution.
1 Department of Physics and JILA, University of
Colorado and National Institute of Standards and Technology, Boulder,
CO 80309-0440, USA.
2 Department of Physics, Sofia
University, Sofia, Bulgaria.
3 Center for X-ray
Optics, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA.
4 Applied Science and Technology, University of
California, Berkeley, CA 94720, USA.
5 Department of
Physics and Astronomy, State University of New York at Stony Brook,
Stony Brook, NY 11794, USA.
*
To whom correspondence should be addressed. E-mail:
murnane{at}jila.colorado.edu
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THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
- High numerical aperture tabletop soft x-ray diffraction microscopy with 70-nm resolution.
- R. L. Sandberg, C. Song, P. W. Wachulak, D. A. Raymondson, A. Paul, B. Amirbekian, E. Lee, A. E. Sakdinawat, C. La-O-Vorakiat, M. C. Marconi, et al. (2008)
PNAS
105, 24-27
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- Harnessing Attosecond Science in the Quest for Coherent X-rays.
- H. Kapteyn, O. Cohen, I. Christov, and M. Murnane (2007)
Science
317, 775-778
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- Inaugural Article: Monitoring molecular dynamics using coherent electrons from high harmonic generation.
- N. L. Wagner, A. Wuest, I. P. Christov, T. Popmintchev, X. Zhou, M. M. Murnane, and H. C. Kapteyn (2006)
PNAS
103, 13279-13285
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- Profile of Margaret M. Murnane.
- T. H. Davis (2006)
PNAS
103, 13276-13278
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- Coherent Soft X-ray Generation in the Water Window with Quasi-Phase Matching.
- E. A. Gibson, A. Paul, N. Wagner, R.'a. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, et al. (2003)
Science
302, 95-98
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