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Science 10 May 2002:
Vol. 296. no. 5570, pp. 1106 - 1109
DOI: 10.1126/science.296.5570.1106
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Reports

An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication

Wenhui Zhou,1 Stephen M. Kuebler,1 Kevin L. Braun,1 Tianyue Yu,3 J. Kevin Cammack,1 Christopher K. Ober,3* Joseph W. Perry,12* Seth R. Marder12*

A two-photon-activatable photoacid generator, based on a bis[(diarylamino) styryl]benzene core with covalently attached sulfonium moieties, has been synthesized. The photoacid generator has both a large two-photon absorption cross section (delta  = 690 × 10-50 centimeter4 second per photon) and a high quantum yield for the photochemical generation of acid (phi H+ = 0.5). Under near-infrared laser irradiation, the molecule produces acid after two-photon excitation and initiates the polymerization of epoxides at an incident intensity that is one to two orders of magnitude lower than that needed for conventional ultraviolet-sensitive initiators. This photoacid generator was used in conjunction with a positive-tone chemically amplified resist for the fabrication of a three-dimensional (3D) microchannel structure.

1 Department of Chemistry,
2 Optical Sciences Center, University of Arizona, Tucson, AZ 85721, USA.
3 Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853, USA.
*   To whom correspondence should be addressed. E-mail: cober{at}ccmr.cornell.edu (C.K.O.); jwperry{at}u.arizona.edu (J.W.P.); smarder{at}u.arizona.edu (S.R.M.).

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THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
Formation and Reversible Dissociation of Coiled Coil of Peptide to the C-Terminus of the HSV B5 Protein: A Time-Resolved Spectroscopic Analysis.
O. J. Brown, S. A. Lopez, A. O. Fuller, and T. Goodson III (2007)
Biophys. J. 93, 1068-1078
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Single-Mode Polymer DBR Lasers with Two-Dimensional Microcavity Structures.
S. YOKOYAMA (2007)
IEICE Trans C: Electronics E90-C, 135-138
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Science. ISSN 0036-8075 (print), 1095-9203 (online)