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Science 2 March 2001:
Vol. 291. no. 5509, pp. 1763 - 1766
DOI: 10.1126/science.1057061
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Reports

Submicrometer Patterning of Charge in Thin-Film Electrets

Heiko O. Jacobs, George M. Whitesides

Thin-film electrets have been patterned with trapped charge with submicrometer resolution using a flexible, electrically conductive electrode. A poly(dimethylsiloxane) stamp, patterned in bas-relief and supporting an 80-nanometer-thick gold film, is brought into contact with an 80-nanometer-thick film of poly(methylmethacrylate) supported on n-doped silicon. A voltage pulse between the gold film and the silicon transfers charge at the contact areas between the gold and the polymer electret. Areas as large as 1 square centimeter were patterned with trapped charges at a resolution better than 150 nanometers in less than 20 seconds. This process provides a new method for patterning; it suggests possible methods for high-density, charge-based data storage and for high-resolution charge-based printing.

Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, MA 02138, USA.
E-mail: hjacobs{at}gmwgroup.harvard.edu (H.O.J.); gwhitesides{at}gmwgroup.harvard.edu (G.M.W.)
Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, MA 02138, USA.
E-mail: hjacobs{at}gmwgroup.harvard.edu (H.O.J.); gwhitesides{at}gmwgroup.harvard.edu (G.M.W.)
Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, MA 02138, USA.
E-mail: hjacobs{at}gmwgroup.harvard.edu (H.O.J.); gwhitesides{at}gmwgroup.harvard.edu (G.M.W.)

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THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals.
V. C. Sundar, J. Zaumseil, V. Podzorov, E. Menard, R. L. Willett, T. Someya, M. E. Gershenson, and J. A. Rogers (2004)
Science 303, 1644-1646
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Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination.
Y.-L. Loo, T. Someya, K. W. Baldwin, Z. Bao, P. Ho, A. Dodabalapur, H. E. Katz, and J. A. Rogers (2002)
PNAS 99, 10252-10256
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