Fabrication and Properties of Free-Standing C60 Membranes
C. B. Eom 1,
A. F. Hebard 1,
L. E. Trimble 1,
G. K. Celler 1, and
R. C. Haddon 1
1 AT&T Bell Laboratories, Murray Hill, NJ 07974
Van der Waals forces that bind C60 molecular solids are found to be sufficiently strong to allow the reproducible fabrication of free-standing C60 membranes on (100) silicon wafers. Membranes, 2000 to 6000 angstroms thick, were fabricated by a modified silicon micro-machining process and were found to be smooth, flat, and mechanically robust. An important aspect of the silicon-compatible fabrication procedure is the demonstration that C60 films can be uniformly and nondestructively thinned in a CF4 plasma. Young's modulus and fracture strength measurements were made on membranes with areas larger than 6 millimeters by 6 millimeters. It may be possible to use C60, membranes for physical property measurements and applications.
Submitted on October 26, 1992
Accepted on December 31, 1992
