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Science 15 May 1992:
Vol. 256. no. 5059, pp. 1009 - 1012
DOI: 10.1126/science.256.5059.1009
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Articles

High-Resolution Imaging by Fourier Transform X-ray Holography

Ian McNulty 1, Janos Kirz 1, Chris Jacobsen 1, Erik H. Anderson 2, Malcolm R. Howells 2, and Dieter P. Kern 3

1 Physics Department, State University of New York, Stony Brook, NY 11794-3800
2 Lawrence Berkeley Laboratory, Berkeley, CA 94720
3 IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598

Fourier transform x-ray holography has been used to image gold test objects with submicrometer structure, resolving features as small as 60 nanometers. The hologram-recording instrument uses coherent 3.4-nanometer radiation from the soft x-ray undulator beamline X1A at the National Synchrotron Light Source. The specimen to be imaged is placed near the first-order focal spot produced by a Fresnel zone plate; the other orders, chiefly the zeroth, illuminate the specimen. The wave scattered by the specimen interferes with the spherical reference wave from the focal spot, forming a hologram with fringes of low spatial frequency. The hologram is recorded in digital form by a charge-coupled device camera, and the specimen image is obtained by numerical reconstruction.

Submitted on December 2, 1991
Accepted on March 16, 1992


THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
High-Resolution Scanning X-ray Diffraction Microscopy.
P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer (2008)
Science 321, 379-382
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Science. ISSN 0036-8075 (print), 1095-9203 (online)