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Science 29 November 1991:
Vol. 254. no. 5036, pp. 1335 - 1342
DOI: 10.1126/science.1962192
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Articles

Science, Vol 254, Issue 5036, 1335-1342
Copyright © 1991 by American Association for the Advancement of Science

articles

Microfabrication techniques for integrated sensors and microsystems

KD Wise and K Najafi

Center for Integrated Sensors and Circuits, University of Michigan, Ann Arbor 48109.

Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing. As they continue to expand, entire microsystems merging electrical, mechanical, thermal, optical, magnetic, and perhaps chemical components should be possible on a common substrate.


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