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Science 6 October 1989:
Vol. 246. no. 4926, pp. 99 - 100
DOI: 10.1126/science.246.4926.99
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Articles

Scanning Tunneling Microscopy and Nanolithography on a Conducting Oxide, Rb0.3MoO3

E. GARFUNKEL 1, G. RUDD 2, D. NOVAK 3, S. WANG 1, G. EBERT 1, M. GREENBLATT 1, T. GUSTAFSSON 3, and S. H. GAROFALINI 2

1 Department of Chemistry, Rutgers—the State University, Post Office Box 939, Piscataway, NJ 08855., Member of the Rutgers University Laboratory for Surface Modification.
2 Department of Ceramic Engineering, Rutgers—the State University, Post Office Box 939, Piscataway, NJ 08855., Member of the Rutgers University Laboratory for Surface Modification.
3 Department of Physics and Astronomy, Rutgers—the State University, Post Office Box 939, Piscataway, NJ 08855., Member of the Rutgers University Laboratory for Surface Modification.

The scanning tunneling microscope has been used to image and modify the surface of a conducting oxide (Rb0.3MoO3)in ambient atmosphere. Individual octahedral MoO6 units of the oxide can be imaged, and under certain conditions defects can be created in the surface that are stable in air. The ability to produce nanometer-sized structures on the surface of an oxide is demonstrated and discussed with reference to nanolithographic applications.

Submitted on July 5, 1989
Accepted on August 29, 1989


THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
Machining Oxide Thin Films with an Atomic Force Microscope: Pattern and Object Formation on the Nanometer Scale.
Y. Kim and C. M. Lieber (1992)
Science 257, 375-377
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Structure of the Reduced TiO2(110) Surface Determined by Scanning Tunneling Microscopy.
G. S. Rohrer, V. E. Henrich, and D. A. Bonnell (1990)
Science 250, 1239-1241
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