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Science 15 February 1985:
Vol. 227. no. 4688, pp. 709 - 714
DOI: 10.1126/science.227.4688.709
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Articles

Laser-Induced Chemistry for Microelectronics

R. M. Osgood 1 and T. F. Deutsch 2

1 Professor of electrical engineering and applied physics at Columbia University, New York 10027.
2 Wellman Laboratory, Massachusetts General Hospital, Boston 02114.

Laser-controlled chemical reactions are being explored for use in all phases of the processing of semiconductor devices. Laser-induced chemical processing can produce submicrometer features without the aid of photolithography. Research is also providing new information on light-excited and light-enhanced interface reactions.

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Science. ISSN 0036-8075 (print), 1095-9203 (online)