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Science 20 February 1970:
Vol. 167. no. 3921, pp. 1129 - 1131
DOI: 10.1126/science.167.3921.1129
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Articles

Image-Formation Technique for Scanning Electron Microscopy and Electron Probe Microanalysis

Kurt F. J. Heinrich 1, Charles Fiori 1, and Harvey Yakowitz 1

1 Institute for Materials Research, National Bureau of Standards, Washington, D.C. 20234

A technique is described for topographic images on the scanning electron microscope and the scanning electron probe microanalyzer. In this technique, the brightness of the oscilloscope is modulated by a signal obtained by mixing the signal (from secondary electrons or targets current) with its first derivative. This enhances minor topographic features which are poorly reproduced in the technique.

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Science. ISSN 0036-8075 (print), 1095-9203 (online)