Macroscopic 10-Terabit–per–Square-Inch Arrays from Block Copolymers with Lateral Order
Soojin Park,1*
Dong Hyun Lee,1
Ji Xu,1
Bokyung Kim,1
Sung Woo Hong,1
Unyong Jeong,2
Ting Xu,3
Thomas P. Russell1
Generating laterally ordered, ultradense, macroscopic arrays
of nanoscopic elements will revolutionize the microelectronic
and storage industries. We used faceted surfaces of commercially
available sapphire wafers to guide the self-assembly of block
copolymer microdomains into oriented arrays with quasi–long-range
crystalline order over arbitrarily large wafer surfaces. Ordered
arrays of cylindrical microdomains 3 nanometers in diameter,
with areal densities in excess of 10 terabits per square inch,
were produced. The sawtoothed substrate topography provides
directional guidance to the self-assembly of the block copolymer,
which is tolerant of surface defects, such as dislocations.
The lateral ordering and lattice orientation of the single-grain
arrays of microdomains are maintained over the entire surface.
The approach described is parallel, applicable to different
substrates and block copolymers, and opens a versatile route
toward ultrahigh-density systems.
2 Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea.
3 Department of Materials Science and Engineering, Department of Chemistry, University of Berkeley, and Material Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA.
* Present address: School of Nano Bio Chemical Engineering, Ulsan National Institute of Science and Technology, BanYeon-Ri 194, Ulsan 689-805, Korea.
To whom correspondence should be addressed. E-mail: russell{at}mail.pse.umass.edu (T.P.R.); tingxu{at}berkeley.edu (T.X.)
