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Science 20 February 2009:
Vol. 323. no. 5917, pp. 1026 - 1030
DOI: 10.1126/science.1168294
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Research Articles

Oxide Nanoelectronics on Demand

Cheng Cen,1 Stefan Thiel,2 Jochen Mannhart,2 Jeremy Levy1*

Electronic confinement at nanoscale dimensions remains a central means of science and technology. We demonstrate nanoscale lateral confinement of a quasi–two-dimensional electron gas at a lanthanum aluminate–strontium titanate interface. Control of this confinement using an atomic force microscope lithography technique enabled us to create tunnel junctions and field-effect transistors with characteristic dimensions as small as 2 nanometers. These electronic devices can be modified or erased without the need for complex lithographic procedures. Our on-demand nanoelectronics fabrication platform has the potential for widespread technological application.

1 Department of Physics and Astronomy, University of Pittsburgh, Pittsburgh, PA 15260, USA.
2 Experimental Physics VI, Center for Electronic Correlations and Magnetism, Institute of Physics, University of Augsburg, D-86135 Augsburg, Germany.

* To whom correspondence should be addressed. E-mail: jlevy{at}pitt.edu

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Science. ISSN 0036-8075 (print), 1095-9203 (online)