Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures
Mark P. Stoykovich,1
Marcus Müller,2
Sang Ouk Kim,3
Harun H. Solak,4
Erik W. Edwards,1
Juan J. de Pablo,1
Paul F. Nealey1
Self-assembly is an effective strategy for the creation of periodic structures at the nanoscale. However, because microelectronic devices use free-form design principles, the insertion point of self-assembling materials into existing nanomanufacturing processes is unclear. We directed ternary blends of diblock copolymers and homopolymers that naturally form periodic arrays to assemble into nonregular device-oriented structures on chemically nanopatterned substrates. Redistribution of homopolymer facilitates the defect-free assembly in locations where the domain dimensions deviate substantially from those formed in the bulk. The ability to pattern nonregular structures using self-assembling materials creates new opportunities for nanoscale manufacturing.
1 Department of Chemical and Biological Engineering and Center for Nanotechnology, University of Wisconsin (UW), Madison, WI 53706, USA.
2 Department of Physics, University of Wisconsin, Madison, WI 53706, USA.
3 Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Republic of Korea.
4 Laboratory for Micro- and Nanotechnology, Paul Scherrer Institute, CH-5232 Villigen PSI, Switzerland.
To whom correspondence should be addressed. E-mail: nealey{at}engr.wisc.edu
