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Science 26 November 2004:
Vol. 306. no. 5701, pp. 1537 - 1540
DOI: 10.1126/science.1102910
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Reports

Three-Dimensional Hydrogen Microscopy in Diamond

P. Reichart,1*{dagger} G. Datzmann,1 A. Hauptner,1 R. Hertenberger,2 C. Wild,3 G. Dollinger1{ddagger}

A microprobe of protons with an energy of 17 million electron volts is used to quantitatively image three-dimensional hydrogen distributions at a lateral resolution better than 1 micrometer with high sensitivity. Hydrogen images of a <110>-textured undoped polycrystalline diamond film show that most of the hydrogen is located at grain boundaries. The average amount of hydrogen atoms along the grain boundaries is (8.1 ± 1.5) x 1014 per square centimeter, corresponding to about a third of a monolayer. The hydrogen content within the grain is below the experimental sensitivity of 1.4 x 1016 atoms per cubic centimeter (0.08 atomic parts per million). The data prove a low hydrogen content within chemical vapor deposition–grown diamond and the importance of hydrogen at grain boundaries, for example, with respect to electronic properties of polycrystalline diamond.

1 Physik Department E12, Technische Universität (TU) München, 85748 Garching, Germany.
2 Department für Physik, Ludwig-Maximilians-Universität (LMU) München, 85748 Garching, Germany.
3 Fraunhofer Institut für Angewandte Festköperphysik, 79108 Freiburg, Germany.



* Present address: Microanalytical Research Centre, School of Physics, University of Melbourne, Victoria, 3010, Australia.

{ddagger} Present address: Angewandte Physik und Messtechnik, Universität der Bundeswehr München, 85577 Neubiberg, Germany.

{dagger} To whom correspondence should be addressed. E-mail: p.reichart{at}ph.unimelb.edu.au

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