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Science 21 March 2003: Vol. 299. no. 5614, pp. 1881 - 1884 DOI: 10.1126/science.1081279
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Reports
Self-Aligned, Vertical-Channel, Polymer Field-Effect Transistors
Natalie Stutzmann,
Richard H. Friend,
Henning Sirringhaus*
The manufacture of high-performance, conjugated
polymer transistor circuits on flexible plastic substrates requires
patterning techniques that are capable of defining critical features
with submicrometer resolution. We used solid-state embossing to produce polymer field-effect transistors with submicrometer critical features in planar and vertical configurations. Embossing is used for the controlled microcutting of vertical sidewalls into polymer multilayer structures without smearing. Vertical-channel polymer field-effect transistors on flexible poly(ethylene terephthalate) substrates were
fabricated, in which the critical channel length of 0.7 to 0.9 micrometers was defined by the thickness of a spin-coated insulator
layer. Gate electrodes were self-aligned to minimize overlap
capacitance by inkjet printing that used the embossed grooves to define
a surface-energy pattern.
Cavendish Laboratory, University of Cambridge, Madingley Road,
Cambridge CB3 0HE, UK.
*
To whom correspondence should be addressed. E-mail:
hs220{at}phy.cam.ac.uk
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