Electrochemical Micromachining
Rolf Schuster,
1*
Viola Kirchner,
1
Philippe Allongue,
2
Gerhard Ertl
1
The application of ultrashort voltage pulses between a
tool electrode and a workpiece in an electrochemical environment allows the three-dimensional machining of conducting materials with
submicrometer precision. The principle is based on the finite time
constant for double-layer charging, which varies linearly with the
local separation between the electrodes. During nanosecond pulses, the electrochemical reactions are confined to electrode regions in close
proximity. This technique was used for local etching of copper and
silicon as well as for local copper deposition.
1 Fritz-Haber-Institut der
Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin,
Germany.
2 Physique des Liquides et Electrochimie,
CNRS UPR 15, 4 Place Jussieu, F-75005 Paris, France.
*
To whom correspondence should be addressed. E-mail:
schuster{at}fhi-berlin.mpg.de
