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Science 7 April 2000: Vol. 288. no. 5463, pp. 113 - 116 DOI: 10.1126/science.288.5463.113
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Reports
Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
Marc A. Unger,
Hou-Pu Chou,
Todd Thorsen,
Axel Scherer,
Stephen R. Quake
*
Soft lithography is an alternative to silicon-based micromachining
that uses replica molding of nontraditional elastomeric materials to
fabricate stamps and microfluidic channels. We describe here an
extension to the soft lithography paradigm, multilayer soft
lithography, with which devices consisting of multiple layers may be
fabricated from soft materials. We used this technique to build active
microfluidic systems containing on-off valves, switching valves, and
pumps entirely out of elastomer. The softness of these materials allows
the device areas to be reduced by more than two orders of magnitude
compared with silicon-based devices. The other advantages of soft
lithography, such as rapid prototyping, ease of fabrication, and
biocompatibility, are retained.
Department of Applied Physics, California Institute of Technology,
Pasadena, CA 91125, USA.
*
To whom correspondence should be addressed. E-mail:
quake{at}caltech.edu
Read the Full Text
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