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Science 6 January 1995:
Vol. 267. no. 5194, pp. 68 - 71
DOI: 10.1126/science.267.5194.68
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Articles

Atomic Resolution of the Silicon (111)-(7x7) Surface by Atomic Force Microscopy

Franz J. Giessibl 1

1 Park Scientific Instruments, 1171 Borregas Avenue, Sunnyvale, CA 94089, USA.

Achieving high resolution under ultrahigh-vacuum conditions with the force microscope can be difficult for reactive surfaces, where the interaction forces between the tip and the samples can be relatively large. A force detection scheme that makes use of a modified cantilever beam and senses the force gradient through frequency modulation is described. The reconstructed silicon (111)-(7x7) surface was imaged in a noncontact mode by force microscopy with atomic resolution (6 angstroms lateral, 0.1 angstrom vertical).

Submitted on August 30, 1994
Accepted on October 31, 1994


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