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Science 2 December 1994:
Vol. 266. no. 5190, pp. 1540 - 1542
DOI: 10.1126/science.266.5190.1540
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Articles

Atomic Control of the SrTiO3 Crystal Surface

Masashi Kawasaki 1, Kazuhiro Takahashi 2, Tatsuro Maeda 3, Ryuta Tsuchiya 3, Makoto Shinohara 4, Osamu Ishiyama 4, Takuzo Yonezawa 2, Mamoru Yoshimoto 3, and Hideomi Koinuma 3

1 PRESTO, JRDC, and Research Laboratory of Engineering Materials, Tokyo Institute of Technology, Nagatsuta, Midori, Yokohama, 226 Japan
2 Shinkosha Co., Ltd., Sakae-ku, Yokohama, 247 Japan
3 Research Laboratory of Engineering Materials, Tokyo Institute of Technology, Nagatsuta, Midori, Yokohama, 227 Japan
4 Keihanna Research Laboratory, Shimazu Corp., Sorakugun, Kyoto 619-02, Japan

The atomically smooth SrTiO3 (100) with steps one unit cell in height was obtained by treating the crystal surface with a pH-controlled NH4F-HF solution. The homoepitaxy of SrTiO3 film on the crystal surface proceeds in a perfect layer-by-layer mode as verified by reflection high-energy electron diffraction and atomic force microscopy. Ion scattering spectroscopy revealed that the TiO2 atomic plane terminated the as-treated clean surface and that the terminating atomic layer could be tuned to the SrO atomic plane by homooepitaxial growth. This technology provides a well-defined substrate surface for atomically regulated epitaxial growth of such perovskite oxide films as YBa2Cu3O7-dgr.

Submitted on August 22, 1994
Accepted on October 12, 1994


THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
Ferroelectricity at the Nanoscale: Local Polarization in Oxide Thin Films and Heterostructures.
C. H. Ahn, K. M. Rabe, and J.-M. Triscone (2004)
Science 303, 488-491
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Science. ISSN 0036-8075 (print), 1095-9203 (online)