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Science 30 October 1992:
Vol. 258. no. 5083, pp. 783 - 785
DOI: 10.1126/science.258.5083.783
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Articles

Ngnochannel Array Glass

R. J. Tonucci 1, B. L. Justus 1, A. J. Campillo 1, and C. E. Ford 2

1 Optical Sciences Division, Naval Research Laboratory, Washington, DC 20375
2 Ni-Tec Division, Varo Inc., Garland, TX 75041

The fabrication and characterization of a glass containing a regular parallel array of submicrometer channels or capillaries are described. The capillaries are arranged in a two-dimensional hexagonal close packing configuration with channel diameters as small as 33 nanometers and packing densities as high as 3 x 1010 channels per square centimeter. The high-temperature stability of the nanochannel glass array is well suited as a host or template for the formation of quantum confined semiconductor structures or as a mask for massively parallel patterned lithographic applications.

Submitted on August 21, 1992
Accepted on October 2, 1992


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