Note to users. If you're seeing this message, it means that your browser cannot find this page's style/presentation instructions -- or possibly that you are using a browser that does not support current Web standards. Find out more about why this message is appearing, and what you can do to make your experience of our site the best it can be.

Site Tools

  • AAAS
  • Subscribe
  • Feedback

Site Search

Search Advanced

Science 29 November 1991:
Vol. 254. no. 5036, pp. 1335 - 1342
DOI: 10.1126/science.1962192
Prev | Table of Contents | Next

Articles

Science, Vol 254, Issue 5036, 1335-1342
Copyright © 1991 by American Association for the Advancement of Science

articles

Microfabrication techniques for integrated sensors and microsystems

KD Wise and K Najafi

Center for Integrated Sensors and Circuits, University of Michigan, Ann Arbor 48109.

Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing. As they continue to expand, entire microsystems merging electrical, mechanical, thermal, optical, magnetic, and perhaps chemical components should be possible on a common substrate.


THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
Development of Microelectromechanical Systems (MEMS) forceps for intraocular surgery.
R B Bhisitkul and C G Keller (2005)
Br. J. Ophthalmol. 89, 1586-1588
   Abstract »    Full Text »    PDF »
Polytrodes: High-Density Silicon Electrode Arrays for Large-Scale Multiunit Recording.
T. J. Blanche, M. A. Spacek, J. F. Hetke, and N. V. Swindale (2005)
J Neurophysiol 93, 2987-3000
   Abstract »    Full Text »    PDF »
Massively Parallel Recording of Unit and Local Field Potentials With Silicon-Based Electrodes.
J. Csicsvari, D. A. Henze, B. Jamieson, K. D. Harris, A. Sirota, P. Bartho, K. D. Wise, and G. Buzsaki (2003)
J Neurophysiol 90, 1314-1323
   Abstract »    Full Text »    PDF »
Accuracy of Tetrode Spike Separation as Determined by Simultaneous Intracellular and Extracellular Measurements.
K. D. Harris, D. A. Henze, J. Csicsvari, H. Hirase, and G. Buzsaki (2000)
J Neurophysiol 84, 401-414
   Abstract »    Full Text »    PDF »
Long-Term Histological and Electrophysiological Results of an Inactive Epiretinal Electrode Array Implantation in Dogs.
A. B. Majji, M. S. Humayun, J. D. Weiland, S. Suzuki, S. A. D’Anna, and E. de Juan Jr (1999)
Invest. Ophthalmol. Vis. Sci. 40, 2073-2081
   Abstract »    Full Text »    PDF »
Gamma Oscillations in the Entorhinal Cortex of the Freely Behaving Rat.
J. J. Chrobak and G. Buzsaki (1998)
J. Neurosci. 18, 388-398
   Abstract »    Full Text »    PDF »
Bipolar Surface Electrical Stimulation of the Vertebrate Retina.
M. Humayun, R. Propst, E. de Juan Jr, K. McCormick, and D. Hickingbotham (1994)
Arch Ophthalmol 112, 110-116
   Abstract »    PDF »
Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System on a Chip.
D. J. Harrison, K. Fluri, K. Seiler, Z. Fan, C. S. Effenhauser, and A. Manz (1993)
Science 261, 895-897
   Abstract »    PDF »
A Photomicrodynamic System with a Mechanical Resonator Monolithically Integrated with Laser Diodes on Gallium Arsenide.
H. Ukita, Y. Uenishi, and H. Tanaka (1993)
Science 260, 786-789
   Abstract »    PDF »
Machining Oxide Thin Films with an Atomic Force Microscope: Pattern and Object Formation on the Nanometer Scale.
Y. Kim and C. M. Lieber (1992)
Science 257, 375-377
   Abstract »    PDF »
Slow Crack Growth in Single-Crystal Silicon.
J. A. Connally and S. B. Brown (1992)
Science 256, 1537-1539
   Abstract »    PDF »
High-frequency network oscillation in the hippocampus.
G Buzsaki, Z Horvath, R Urioste, J Hetke, and K Wise (1992)
Science 256, 1025-1027
   Abstract »    PDF »


To Advertise     Find Products

Science. ISSN 0036-8075 (print), 1095-9203 (online)