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Science 15 October 1982:
Vol. 218. no. 4569, pp. 223 - 228
DOI: 10.1126/science.218.4569.223
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Articles

Thermal-Wave Imaging

Allan Rosencwaig 1

1 President of Therma-Wave, Inc., Fremont, California 94539

Thermal features on and beneath the surface of a sample can be detected and imaged with a thermal-wave microscope. Various methodologies for the excitation and detection of thermal waves are discussed, and several applications, primarily in microelectronics, are presented.

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Science. ISSN 0036-8075 (print), 1095-9203 (online)